Fundraising September 15, 2024 – October 1, 2024 About fundraising
7

A low-power, micromachined, double spiral hotplate for MEMS gas sensors

Year:
2015
Language:
english
File:
PDF, 1.39 MB
english, 2015
17

Deposition and process development of AlN for MEMS acoustic sensor

Year:
2018
Language:
english
File:
PDF, 1.04 MB
english, 2018
18

Development of micro-hotplate and its reliability for gas sensing applications

Year:
2018
Language:
english
File:
PDF, 2.42 MB
english, 2018